Recently, Wuhan Taiziwei Optoelectronics Technology Co., Ltd. in China launched its T150 A photoresist product, which has successfully passed mass pro...
The process node is not a real resolution, just a marketing term, feature sizes for 5 nm are in the few tens of nanometers. And chinese foundry SMIC uses quadruple patterning to get those feature sizes from less powerful lithography tools.
The process node is not a real resolution, just a marketing term, feature sizes for 5 nm are in the few tens of nanometers. And chinese foundry SMIC uses quadruple patterning to get those feature sizes from less powerful lithography tools.